
Windows |
|
Diameter |
D1--D450mm |
Material |
Optical glass, quartz glass, CaF2, MgF2, Ge, Si, ZnS, |
Thickness |
0.3mm(D150mm) |
Surface quality |
10-5 |
Surface error |
λ/40--λ/10 |
Parallelism |
4--10 arcsec |
TTV |
5um |